Managing yield excursion
Contamination, process fault or equipment failure…what is causing the yield excursion? Real-time monitoring processes and validated statistical models may not capture all the information needed to help analyze the issue and find the solution quickly.
In search of the root cause, process engineers apply the sophisticated pattern-matching algorithms of Process Rules Discovery. After uploading production data, the system analyzes all data sets and in seconds displays potential explanations in a single, easy-to-understand view. Explanations are reviewed and what-if scenarios developed. Then new settings are pushed to the shop floor and a new Best Operational Practice is defined.
With Best Operational Practices and historical data defined, Process Rules Discovery (PRD) helps semiconductor fab and assembly manufacturers determine the leanest, most robust and reliable process possible. This advanced learning tool uses patented algorithms, or a rule induction system, to extract from a set of processes the patterns that cause quality defects even when every parameter is within specifications.
Rather than relying on subjective opinions or complex models, PRD allows the user to generate a set of physical rules instead of a single model and compare it to the standard generic model. Process engineers now have the ability to make yield predictions, saving considerable time waiting for electronic test results.
Process Rules Discovery answers the WHY question, essential for continuous improvement. Why are two identically produced batches different? Why is it that when one module in a cluster tool goes down, the entire process comes to a halt? Why are test yields so poor when production tolerances are within range? Because Pertinence Suite has solved the complex issue of capturing relevant data and offering best practice corrective action, manufacturers have the ability to systematically avoid reproducing past mistakes while improving first pass yield.
Manufacturing Operations
Putting you in control
It's a good day and production is going well.With just a few clicks, you have total visibility of your production process. WIP is on schedule, wafer output is within specifications. The system is monitoring 260 steps and hundreds of tools and is collecting thousands of pieces of data.
With an intuitively easy-to-understand interface, Pertinence Suite is providing all requested Six Sigma and Lean manufacturing KPIs. Everything is in sync and you're in control. And if an anomaly is detected, you can react immediately.
Real-time data is the basis of process control and continuous improvement. The Pertinence Suite Process Execution module collects all relevant fab, test or production information to ensure all procedures are completed and documented according to plan. Whether data is collected using DNC from automated machine tools or entered on the shop floor, it serves as both a traceable record of the build process to meet compliance requirements and is utilized in Pertinence Suite's pattern matching recognition technology.
The main goal is to reduce time to yield and time to market. On the shop floor, it's about eliminating bottlenecks, wafer routing and cutting throughput losses and non-productive wafer time. Wherever the responsibility, complex manufacturing management depends on the Process Execution module to synchronize and track both product and process activities, allowing the operation to achieve its production goals.
Wafer production is underway. You have configured Operations Advisor Dashboard to run a risk analysis before etching. At this checkpoint, you receive an alert from the dashboard advising of a wafer-at-risk.
Using Process Rules Discovery, you learn that the materials and equipment in use, although within specification, have a history: If you use Silicon provided by Supplier X, while using Etcher C and Doping D, the risk to scrap the chip is 75%. If you use Etcher B combined with Doping F, the risk decreases to 10%. Now you know what to do.
Historical lessons and Best Operational Practices allow Operations Advisor Dashboard to quickly and easily detect a defect risk before a condition becomes irreparable. Intercim's Pattern-Matching Process Control® and inline defect monitoring capability provides operators or production line managers both risk evaluation and preventative or adjustment recommendations. And unlike systems that require modifications of control limits in the process, this Advanced Process Control and optimization technology uses on demand or event driven adjustments inside the existing control range.
Operations Advisor monitors workstation performance by providing at-a-glace, real-time visibility of production status, quality concerns and schedule variances. The risk of failing for recurring reasons is virtually eliminated, reducing cost of poor quality.
Quality Assurance
Knowledge is power
You are asked to trim time to yield by 8% and you sit down to do the math.
There are 250 process steps in your CMOS wafer fab with process times anywhere between 30 seconds and just over six minutes. With an average process time of about three minutes, it should take you about 14 hours to produce a semiconductor wafer.
So why is your cycle time averaging 16 days? Performance Tracker can answer your questions.
With constantly changing variables such as labor, tool availability and quality, it becomes necessary to continually monitor, analyze and update best practices. Using the Pertinence Suite Performance Tracker, metrics like test yields, cycle times and emergent work, including non-conformances, are presented in an easy to understand dashboard. Shop floor operators and managers alike can query Performance Tracker to learn where drifts or inconsistencies are occurring or to run and analyze detailed reports. This information is vital in confirming KPIs are being met, to affirm strategic direction or to make process improvements.
Supply Chain
You just began testing vendor-supplied chips from several facilities. The rate of defects is alarming and inconsistent as to the plant source.
You turn to your supplier portal within Pertinence Suite and immediately communicate defect information, which includes the complete data set, to the appropriate suppliers in the US and Asia. Because this defect could potentially affect delivery of an order, your customer is also alerted via the portal as well. Key stakeholders have the information they need to take corrective measures and adjust expectations.
Today's shop floor must meet the demands of the global economy. And managing suppliers, wherever they are located, has never been more important. As a result, silos of information between internal departments are being integrated. The walls between operations on different continents are crumbling.
Advancements in web technology and our own innovations in complex manufacturing are helping Intercim revolutionize manufacturing and test operations. Service Oriented Architecture allows seamless data sharing between a process engineer and the operations manager in the same facility and alerts the yield manager of supplier issues globally.